技術情報

DCG特許付与情報 (Grant)

US Patent Other Patent Title
7,327,452
(February 5, 2008)
  Light Beam Apparatus and Method for Orthogonal Alignment of Specimen
7,323,862
(January 29, 2008)
  Contactless measurements of voltage characteristics of dynamic electrical signals in integrated circuits
7,314,767
(January 1, 2008)
  Method for Local Wafer Thinning and Reinforcement
7,297,948
(November 20, 2007)
  Column Simultaneously Focusing a Particle Beam and an Optical Beam
7,257,507
(August 14, 2007)
  System and Method for Determining Probing Locations on IC
7,245,133
(July 17, 2007)
  Integration of Photon Emission Microscope and Focus Ion Beam
7,243,039
(July 10, 2007)
  System and Method for Determining Probing Locations on IC
7,230,240
(June 12, 2007)
  Enhanced Scanning Control of Charged Particle Beam Systems
7,228,464
(June 5, 2007)
  PICA System Timing Measurement & Calibration
7,227,702
(June 5, 2007)
  Bi-Convex Solid Immersion Lens
7,227,580
(June 5, 2007)
  Knife Edge Tracking System and Method
7,224,828
(May 29, 2007)
Taiwan I256097 Time Resolved Non-Invasive Diagnostics System
7,115,426
(October 3, 2006)
  Method and Apparatus for Addressing Thickness Variations of a Trench Floor Formed in a Semiconductor Substrate
7,135,678
(November 14, 2006)
  Charged Particle Guide
7,135,123
(November 14, 2006)
  Method and System for Integrated Circuit Backside Navigation
7,123,035
(October 17, 2006)
  Optics Landing System and Method Therefor
7,113,630
(September 26, 2006)
  PICA System Detector Calibration
7,102,374
(September 5, 2006)
  Spray Cooling Thermal Management System and Method for Semiconductor Probing, Diagnostics, and Failure Analysis
7,060,196
(June 13, 2006)
  FIB Milling of Copper over Organic Dielectrics
7,049,593
(May 23, 2006)
France 2812455 Superconducting Single Photon Detector
7,045,791
(May 16, 2006)
Germany 345871
France 2806527
Taiwan NI-203223
Column Simultaneously Focusing a Particle Beam and an Optical Beam
7,042,647
(May 9, 2006)
  Scanning Optical System
7,042,563
(May 9, 2006)
  Optical Coupling for Testing Integrated Circuits
7,038,442
(May 2, 2006)
  Apparatus and Method for Detecting Photon Emissions from Transistors
7,036,109
(April 25, 2006)
  Imaging Integrated Circuits with Focused Ion Beam
7,012,537
(March 14, 2006)
  Beacon Circuit for Photo Emission Voltage Analysis
7,009,173
(March 7, 2006)
  Lens Mount Integrated with a Thermoelectrically Cooled Photodetector Module
6,985,219
(January 10, 2006)
  Optical Coupling for Testing Integrated Circuits
6,976,234
(December 13, 2005)
  Apparatus & Method for Measuring Characteristics of Dynamic Electrical Signals in Integrated Circuits
6,967,491
(November 22, 2005)
  Spatial and Temporal Selective Laser Assisted Fault Localization
6,961,672
(November 1, 2005)
  Universal Diagnostic Platform for Specimen Analysis
6,958,248
(October 25, 2005)
  Method and Apparatus for the Improvement of Material/Voltage Contrast
6,956,365
(October 18, 2005)
  System and Method for Calibration of Testing Equipment using Device Photoemission
6,955,930
(October 18, 2005)
  Method and Apparatus for Determining Thickness of a Semiconductor Substrate at the Floor of a Trench
6,943,572
(September 13, 2005)
  Apparatus and Method for Detecting Photon Emissions from Transistors
6,939,209
September 6, 2005()
  Method for Backside Die Thinning and Polishing of Packaged Integrated Circuits
6,905,623
(June 14, 2005)
  Precise, In-situ Endpoint Detection for Charged Particle Beam
6,891,363
(May 10, 2005)
  Apparatus and Method for Detecting Photon Emissions from Transistors
6,872,581
(March 29, 2005)
  Measuring Back-Side Voltage of an Integrated Circuit
6,859,031
(February 22, 2005)
Korea 734186
Taiwan 1264791
Apparatus and Method for Dynamic Diagnostic Testing of Integrated Circuits
6,855,622
(February 15, 2005)
  Method and Apparatus for Forming a Trench Through a Semiconductor Substrate
6,853,941
(February 8, 2005)
  Open-Loop for Waveform Acquisition
6,848,087
(January 25, 2005)
  Sub-Resolution Alignment of Images
6,836,131
(December 28, 2004)
Taiwan I 251067 Spray Cooling and Transparent Cooling Plate Thermal Management System
6,828,811
(December 7, 2004)
  Optics Landing System and Method Therefor
6,825,978
(November 30, 2004)
Singapore 106891
Korea 433311
High Sensitivity Thermal Radiation Detection with an Emission Microscope with Room Temperature Optics
6,824,655
(November 30, 2004)
  Process for Charged Particle Beam Micro-Machining of Copper
6,819,117
(November 16, 2004)
  PICA System Timing Measurement & Calibration
6,812,464
(November 2, 2004)
Taiwan 166651 Superconducting Single Photon Detector
6,797,581
(September 28, 2004)
  Avalanche Photo Diode for Photon Counting Applications and Method Thereof
6,781,218
(August 24, 2004)
  Method and Apparatus for Accessing Internal Nodes of an Integrated Circuit Using IC Package Substrate
6,778,327
(August 17, 2004)
Taiwan I 249622 Bi-Convex Solid Immersion Lens
6,744,267
(June 1, 2004)
Singapore 108393 Test System and Methodology
6,737,853
(May 18, 2004)
  Photoconductive-Sampling Voltage Measurement
6,731,327
(May 4, 2004)
  Dynamic Structural Coupling Mechanism for Reducing Optical Degradation in Vibrating Environments
6,720,588
(April 13, 2004)
Taiwan 201324 Avalanche Photo Diode for Photon Counting Applications
6,672,947
(January 6, 2004)
  Method for Global Die Thinning and Polishing of Flip-Chip Packaged Integrated Circuits
6,630,667
(October 7, 2003)
Taiwan 159509 Compact, High Collection Efficiency Scintillator for Secondary Electron Detection
6,621,275
(September 16, 2003)
  Time Resolved Non-Invasive Diagnostics System
6,594,086
(July 15, 2003)
EPC 1466194 Bi-Convex Solid Immersion Lens
6,518,571
(February 11, 2003)
  Through the Substrate Investigation of Flip-Chip ICs
6,501,288
(December 31, 2002)
Taiwan 197139 On-Chip Optically Triggered Latch for IC Time Measurements
6,496,261
(December 17, 2002)
Taiwan 194194 Double-Pulsed Optical Interferometer for Waveform Probing of Integrated Circuits
6,462,814
(October 8, 2002)
Taiwan 161277 Beam Delivery and Imaging for Optical Probing of a Device Operating under Electrical Test
6,410,924
(June 25, 2002)
  Energy Filtered Focused Ion Beam Column
6,252,222
(June 26, 2001)
Taiwan 170491 Differential Pulsed Laser Beam Probing of Integrated Circuits
6,225,626
(May 1, 2001)
  Through the Substrate Investigation of Flip-Chip ICs
6,081,110
(June 27, 2000)
Korea 0628445 Thermal Isolation Plate for Probe Card
5,920,073
(July 6, 1999)
  Optical System with an Axially Moveable Apertured Plate
5,905,577
(May 18, 1999)
  Dual-Laser Voltage Probing of ICs
5,905,266
(May 18, 1999)
Taiwan NI-121589 Charged Particle Beam System with Optical Microscope
5,840,630
(November 24, 1998 )
Germany 69703611.1
Korea 10-510431
Taiwan NI-109360
FIB Etching Enhanced with 1,2 Di-Iodo-Ethane
5,821,549
(October 13, 1998)
  Through the Substrate Investigation of Flip-Chip ICs
5,747,818
(May 5, 1998)
France 0838836
Germany 69724549.7
Thermoelectric Cooling Gas-Assisted FIB System
5,731,984
(March 24, 1998)
  Vector-Based Waveform Acquisition and Display
5,700,526
(December 23, 1997)
  Insulator Deposition Using Focused Ion Beam
5,698,474
(December 16, 1997)
  High Speed Diamond-Based Machining of Silicon Semiconductor Die in Wafer and Packaged Form for a Backside Emission Microscope Detection
5,675,499
(October 7, 1997)
  Method of Probing a Net of an IC at an Optimal Probe-Point
5,638,005
(June 10, 1997)
  Predictive Waveform Acquisition
5,616,921
(April 1, 1997)
  Self-Masking FIB Milling
5,604,819
(February 18, 1997)
  Determining Offset between Images of an IC
5,530,372
(June 25, 1996)
  Method of Probing a Net of an IC at an Optimal Probe-Point
5,475,316
(December 12, 1995)
  Transportable Image Emission Microscope
5,401,972
(March 28, 1995)
  Layout Overlay for FIB Operations (Includes electronic beam deflection)
  Japan 3633993 Optimal Probe Point Placement
5,392,222
(February 21, 1995)
  Locating a Field of View in which Selected IC Conductors are Unobscured
5,357,116
(October 18, 1994)
  Focused ION Beam Processing with Charge Control
5,210,487
(May 11, 1993)
  Double-Gated Integrating Scheme for Electron Beam Tester
5,282,088
(January 25, 1994)
  Aplanatic Microlens and Method for Making Same
5,270,643
(December 14, 1993)
  Pulsed Laser Photoemission Electron-Beam Probe
5,144,225
(September 1, 1992)
  Methods and Apparatus for Acquiring Data from Intermittently Failing Circuits
5,127,064
(June 30, 1992)
  High Resolution Image Compression Methods and Apparatus
5,054,097
(October 1, 1991)
  Methods and Apparatus for Alignment of Images
4,912,405
(March 27, 1990)
  Magnetic Lens and Electron Beam Deflection System

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